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您好,
看 datasheet 典型应用, 如下截图曲线,分辨率可以到um级别:
在提高精度和噪声性能方面,建议您看下 Optimizing L Measurement Resolution for the LDC161x and LDC1101,也可以查看 Setting LDC1312/4, LDC1612/4, and LDC1101 Sensor Drive Configuration 应用文档。 此外,您还可以采取一些EMI预防措施,以帮助提高噪音性能。 请参阅 EMI Considerations for Inductive Sensing 应用文档。